Alignment, Assembly, and Final Inspection of Microlithography Optics

by | Sep 5, 2012

Measurement system “OptiCentric Max UP” for the ultra accurate measurement of centration error, lens center thickness and air spacing of optical components for microlithography.

Measurement system “OptiCentric Max UP” for the ultra accurate measurement of centration error, lens center thickness and air spacing of optical components for microlithography.

The system is specifically designed for microlithography and space optics with a diameter up to 800 mm, 2,000 mm height and 1,500 kg weight. The all-granite, all-air bearing construction provides exceptional rigidity and thermal stability, smooth motion and unrivaled accuracy. Additional alignment unit equipped with heavy duty piezoelectric actuators provides automated alignment with submicron accuracy.

Trioptics GmbH
Hafenstr. 35–39
22880 Wedel, Germany
Phone: +49 (0)4103 18006-0
Fax: +49 (0)4103 18006-20
E-mail: info@trioptics.com
Website: www.trioptics.com