The dry pumps “A 100 L” with their compact dimensions were specially developed for flexible integration in semiconductor production facilities. They are ideal for clean applications such as load-lock chambers and transfer chambers as well as for all other noncorrosive applications. Despite their compact dimensions these pumps provide high pumping speeds and short pump down times. Today, the pumps are installed worldwide in all leading semiconductor fabs and are suitable for operation in cleanrooms.
The further development “A 100 L ES” cuts energy consumption by up to 50 %. Its pumping speed is significantly higher in the low pressure range. Additional benefits include a lower final pressure and reduced noise level. This significantly reduces operating costs. Annual savings per pump total up to 7,900 kWh per year (this corresponds to 3.9 tons of CO2), at a typical 300 mm semiconductor fab level equipped with 1,300 load-lock pumps, the energy saving adds up to 10 GWh, or about 360 k€ per year. In addition to energy savings, the final pressure is reduced to 7·10–4 mbar (hPa). This opens up new potential applications requiring an enhanced pumping capacity combined with low pressure. The noise level is also reduced from 58 dB (A) to 55 dB (A).