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Introduction 1. Gridded ion sources 2. Gridless industrial broad beam ion sources 3. Main operational parameters 4. Regime of non-self-sustained discharge and its importance 5. Ion source and vacuum chamber 6. Oscillations and instabilities in ion sources 7. Operation of ion sources with reactive gases 8. Cathodes for Ion Sources 9. Radiation from ion source 10. Ion beam contamination from various parts of ion sources 11. New methods of low energy utilization 12. Ion beam figuring machine and technology 13. Varieties of end-Hall ion sources 14. Linear ion sources 15. Nontraditional ion sources 16. Ion sources problems and solutions 17. About standardization of ion sources Conclusions References [XIV, 312 Pages, Hardcover] |
Industrial Ion Sources
Introduction 1. Gridded ion sources 2. Gridless industrial broad beam ion sources 3. Main operational parameters 4. Regime of non-self-sustained discharge and its importance 5. Ion source and vacuum chamber 6. Oscillations and instabilities in ion sources 7. Operation of ion sources with reactive gases 8. Cathodes for Ion Sources 9. Radiation from ion […]
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